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  • Introduction

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    High-polymer materials (such as PTFE, PVDF, PVC, PP, and EPDM) are widely used in semiconductor facility engineering due to their excellent corrosion resistance, high purity, temperature resistance, and chemical resistance. These materials are crucial in facility engineering, where high-polymer materials (plastics, synthetic resins, and rubbers) are extensively used in pipeline systems, corrosion protection engineering, special gas supply, chemical storage, and electronics fab cleanroom equipment. Their lightweight nature, corrosion resistance, high purity, and environmentally friendly properties optimize the production environment.

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    Case Study | Applications of Polymer Composite Materials

    The transportation design of boats/cassettes or FOUPs (Front-Opening Unified Pods) mainly utilizes low-friction, high-wear-resistant, and anti-static polymer wheels. These special wheels are designed for cleanroom automated material handling systems, ensuring wafers remain clean during transport and are precisely compatible with automated material handling systems (AMHS).